Integrated Physical Vapor Deposition and Glovebox (Lesker Nano36)
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Parylene Chemical Vapor Deposition (SCS Labcoater 3)
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Reactive Ion Etching (Glow Research)
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Sputter & Plasma Etcher (Denton Vacuum Desk II Sputter Coater)
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Fumehood (Air Sentry V3)
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Semiconductor parameter analyzer (HP 4155A)
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Semiconductor parameter analyzer (HP 4156A)
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Probe station (Everbeing)
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RLC meter (NF ZM 2372)
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Microscope (Nikon Eclipse LV100ND)
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Oscilloscope (Keysight DSOX2004A)
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Spin coater (Ni-Lo 4) |
Hot plate (Corning) |
Laboratory scale (VWR) |
Ultrasonic cleaner (VWR) |
Cyclic voltammeter (CH Instruments 1200C) |
Desiccator box (Plas-Labs) |
3D printer (MakerBot Replicator 2)
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Microfluidics station (custom)
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